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In this e-Learning module, the different types of oxide-related defects will be defined and identified. This module will also identify the oxide-related defect causes and control measures to combat these defects. There will be a brief examination of certain gating system topics to understand how oxides can be affected by the gating system. By the end of this module, you will be able to identify the types of oxide-related defects and list two control measures for preventing oxides. (0.1 CEU)